Foundations of MEMS
Liu, Chang
Foundations of MEMS - 2nd ed. - Boston Pearson 2012 - 576 p
9780273752240
Microelectromechanical systems.
TK 7875 .L48/
Foundations of MEMS - 2nd ed. - Boston Pearson 2012 - 576 p
9780273752240
Microelectromechanical systems.
TK 7875 .L48/