O. Brand <br/><br/>
CMOS-MEMS 

 - Weinheim  Wiley-VCH Verlag GmbH & Co.KGaA  2005 
 - 594 p 
<br/><br/><label>ISBN: </label>3-527-29558-5 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering
<br/><br/><label>LC Class. No.: </label>TK 7875 .C667/