Liu, Chang <br/><br/>
Foundations of MEMS 

 - 2nd ed. 
 - Boston  Pearson   2012 
 - 576 p 
<br/><br/><label>ISBN: </label>9780273752240 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TK 7875 .L48/