| 000 | 00412nam a2200181Ia 4500 | ||
|---|---|---|---|
| 005 | 20250423094759.0 | ||
| 008 | 250422s9999 xx 000 0 und d | ||
| 020 | _a3-527-29558-5 | ||
| 050 | _aTK 7875 .C667/ | ||
| 100 | _aO. Brand | ||
| 245 | 0 | _aCMOS-MEMS | |
| 260 | _aWeinheim | ||
| 260 | _bWiley-VCH Verlag GmbH & Co.KGaA | ||
| 260 | _c2005 | ||
| 300 | _a594 p | ||
| 650 | _aEngineering | ||
| 942 | _cBK | ||
| 999 |
_c28275 _d28275 |
||