| 000 | 00442nam a2200193Ia 4500 | ||
|---|---|---|---|
| 005 | 20250423095417.0 | ||
| 008 | 250422s9999 xx 000 0 und d | ||
| 020 | _a9780273752240 | ||
| 050 | _aTK 7875 .L48/ | ||
| 100 | _aLiu, Chang | ||
| 245 | 0 | _aFoundations of MEMS | |
| 250 | _a2nd ed. | ||
| 260 | _aBoston | ||
| 260 | _bPearson | ||
| 260 | _c 2012 | ||
| 300 | _a576 p | ||
| 650 | _aMicroelectromechanical systems. | ||
| 942 | _cBK | ||
| 999 |
_c30188 _d30188 |
||