000 00603nam a2200181Ia 4500
005 20250423100248.0
008 250422s9999 xx 000 0 und d
020 _a9781032106281
050 _aTK 787.99 .M44 .W36/
100 _aWang, Xiaolei
245 0 _aMOS interface physics, process and characterization
260 _aBoca Raton
260 _bCRC Press
260 _c2022
300 _aviii, 161p.: ill.
650 _aMetal oxide semiconductors--Design and construction--Mathematics. Semiconductors--Junctions. Integrated circuits--Research. Solid state physics--Experiments.
942 _cBK
999 _c32772
_d32772