| 000 | 00417nam a2200193Ia 4500 | ||
|---|---|---|---|
| 005 | 20250603144957.0 | ||
| 008 | 250603s9999 xx 000 0 und d | ||
| 020 | _a9780273752240 | ||
| 050 | _aTK 7875 .L48/ | ||
| 100 | _aLiu, Chang | ||
| 245 | 0 | _aFoundations of MEMS | |
| 250 | _a2nd ed. | ||
| 260 | _aBoston | ||
| 260 | _bPearson | ||
| 260 | _c 2012 | ||
| 300 | _a576 p | ||
| 650 | _aBoston | ||
| 942 | _cBK | ||
| 999 |
_c40510 _d40510 |
||